• 专利附录
  • 专利说明
  • 权利要求
  • 类似技术
  • 同族专利
  • 引用文献
  • 法律状态
  • 优先权
    • 专利摘要:
    a flow controller (10) including a flow detection unit (14) that is provided with a detection unit (12) for detecting the flow rate of a fluid is described; and a flow control unit (180) which is coupled to the flow detection unit (14) and which is capable of adjusting a fluid flow rate. the detection sensor (38) constituting the detection unit (12) comprises a thermal flow sensor using mems technology, and the flow rate that was detected by the detection sensor (38) is sent to the control unit (24) . In addition, in the flow control unit (18), the air supply state to the supply room (84) is switched by each of the use supply solenoid valves (92) and use exhaust solenoid valves ( 94) and based on the air supply state, a control valve (58) closes and opens.
    公开号:BR112012009504B1
    申请号:R112012009504-8
    申请日:2010-09-16
    公开日:2019-10-15
    发明作者:Takeshi Sakasegawa；Yuta Oshima
    申请人:Smc Kabushiki Kaisha；
    IPC主号:
    专利说明:

    FLOW CONTROLLER
    Technical field
    The present invention relates to a flow controller, which is able to detect the flow rate of a fluid flowing through a passage and to control the flow rate.
    Background art
    Until now, as revealed in the Japanese patent specification no. 2784154, a flow controller consists of a flow rate detector to measure the flow rate of a fluid, and a proportional valve arranged in parallel to the flow rate detector. A main flow passage extends through the interior of the flow rate detector. In the inner wall of the main flow passage, a conduit inlet and a conduit outlet are opened, which are connected to a conduit respectively. A pair of heat-sensitive coils are wound in the conduit, which are connected to an amplifier. In addition, the flow rate of the fluid flowing through the conduit is estimated using a difference in resistance, which occurs due to a temperature difference generated between the heat sensitive coils.
    In addition, in the proportional valve, a diaphragm is disposed in the center of a hollow proportional valve body, the periphery of the diaphragm being attached to the proportional valve body. A valve stem, which interconnects the diaphragm and the valve body, is connected to the center of the diaphragm. In addition, a return spring is arranged in an upper portion of the diaphragm. The diaphragm is normally driven down by the return spring, and
    2/21 together with it, air pressure is supplied into a chamber under the diaphragm under a switching action of a supply solenoid valve or alternatively, the air pressure inside the chamber is discharged to the outside under an action for switching a discharge solenoid valve.
    the diaphragm is displaced upwards in opposition to the elastic force of the return spring, whereby the valve body separates away from the valve seat allowing the fluid to flow through it. At that time, the flow rate of the fluid is detected by the flow rate detector, and based on the detection result detected by the flow rate detector, the flow rate is controlled by feedback by operating the supply solenoid valve and the discharge solenoid valve.
    In general, with the aforementioned flow controller, as its structure is complex and the device is comparatively large in scale, recently, there have been demands for a structure that is in a simplified and smaller scale.
    On the other hand, with the conventional technique according to Japanese patent no. 2784154, in the flow rate detector mentioned above, although a capillary heating system is adopted in which heat sensitive coils are wound with respect to a thin metal duct, as a time delay is generated in the duct when heat is transferred from the heat sensitive coils, the response time is delayed. In addition, when the flow rate detector is mounted, since work is required to wind the heat sensitive coils
    3/21 in the duct and to weld the duct with respect to the body, the assembly operation is complex, coupled with concerns about increased manufacturing costs.
    In addition, the proportional valve is constructed to open and close the valve body by a diaphragm, and for the proportional valve to be placed in a closed valve state in which the valve body is seated on the valve seat, a large elastic force is required for the return spring. As a result, there is a need for the return spring to be made on a large scale, leading to a problem in which the size of the product is increased. In addition, in case the elastic force of the return spring is large, the minimum operating pressure must also be large, and therefore there is concern that the proportional valve cannot be operated at low pressures.
    In addition, for example, in the event that a solenoid valve, which is operated by a control signal, is arranged on the proportional valve in place of a diaphragm operated by air pressure, and a structure is provided therein to open and close the valve body by operating the solenoid valve, then energy consumption is increased, and together with it, cases in which accurate detection results cannot be obtained as a result of heat generated in the solenoid section of the solenoid valve can be expected being transferred to the flow rate detector.
    Summary of the invention
    A general objective of the present invention is to provide a flow controller, which can be made smaller in scale
    4/21 and of simplified structure, which can reduce energy consumption and be operated at low pressures when the flow rate of a fluid is controlled, together with allowing the flow rate to be controlled quickly.
    The present invention is characterized by a flow controller comprising a body having a first passage arranged on one side upstream through which a fluid flows, a second passage arranged on one side downstream with respect to the first passage, and a section of strangulation arranged between the first passage and the second passage, a flow rate detector arranged in the body and which has a detection unit that is capable of detecting the flow rate of the fluid flowing from the first passage to the second passage, a flow rate controller for controlling a fluid flow rate through the valve body and which is arranged in parallel with the flow rate detector, the flow rate controller including a diaphragm assembly which is displaced by air supply pilot, a valve body connected to the diaphragm assembly via a stem, and a spring that induces the valve body in one direction to be seated on a valve seat formed in the body, in which the detection unit consists of a MEMS sensor, the flow rate controller further comprising a balancing structure to balance a pressure force applied from the diaphragm assembly with respect to the body of valve with a pressure force applied from the spring with respect to the valve body.
    According to the present invention, by providing the flow rate detection unit including the flow rate unit
    5/21 detection, which is capable of detecting the fluid flow rate, in the body, which is equipped with the first and second passages and the choke section through which the fluid flows, and by using the MEMS sensor in the unit detection, the detection time when the fluid flow rate is detected can be shortened, and the device can be made smaller in scale. Along with it, since the device can be operated at low current, energy consumption can be reduced. In addition, as a balancing structure is provided to balance a pressure force applied from the diaphragm assembly with respect to the valve body with a pressure force applied from the spring with respect to the valve body, the valve body can be easily operated by low pressure pilot air. Along with it, the spring can be adjusted with a small elastic force, so the valve body can be operated quickly and the flow rate control unit can be made in miniature, along with allowing the flow controller to be done on a smaller scale.
    Brief description of the drawings
    Figure 1 is a general configuration diagram of a flow controller according to an embodiment of the present invention;
    Figure 2 is an enlarged cross-sectional view of a flow rate control unit of Figure 1; and
    Figure 3 is a schematic structural diagram of a flow rate control system including the flow controller in figure 1.
    6/21
    Description of modalities
    A preferred embodiment of a flow controller according to the present invention will be described below with reference to the accompanying drawings.
    In figure 1, the reference numeral 10 indicates a flow controller according to an embodiment of the present invention.
    As shown in figures 1 to 3, the flow controller 10 includes a flow rate detection unit (flow rate detector) 14 equipped with a detection unit 12 to detect a flow rate of a fluid, and a unit flow rate control (flow rate controller) 18 connected via an adapter 16 to the flow rate detection unit 14 and which is capable of adjusting the fluid flow rate. A fluid (for example, air), which is supplied from a non-illustrated fluid supply source, after being supplied from the side of the flow rate detection unit 14, flows into the rate control unit flow rate 18. In addition, the flow rate detection unit 14 and the flow rate control unit 18 can be connected together directly, without intervention of the aforementioned adapter 16.
    The flow rate detection unit 14 is composed of a first body 22 having a first passage 20 through which a fluid flows, the detection unit 12 arranged to confront the first passage 20 to detect the fluid flow rate, a control unit 24 arranged on top of detection unit 12 and which a detected detection result
    7/21 by the detection unit 12 is transmitted, and a display unit 26 which is capable of displaying a result calculated by the control unit 24.
    The first body 22 includes the first passage 20, which penetrates in a horizontal direction through the interior thereof. A tube (not shown) to which a fluid is supplied via a connection element 28a is connected at one end of the first body 22, and the other end thereof, a second body 30 constituting the flow rate control unit 18 is connected while fitting adapter 16 between them. In addition, the fluid which is supplied from the tube not shown, after having flowed through the first passage 20 of the first body 22, passes through the interior of the adapter 16, and is supplied to the flow rate control unit 18.
    A choke section 32, which is reduced in diameter in an inward radial direction, is included in the first passage 20 in the vicinity of the center thereof along the longitudinal direction. The detection unit 12 is arranged in an upper portion of the first passage 20 so that it faces the throttling section 32. Furthermore, in the first passage 20, on one side upstream of the throttling section 32, or more specifically, in a position on an extreme side of the first passage 20 with respect to the choke section 32, a plurality of flow rectifiers 34 is arranged to rectify the flow of the fluid (see figure 1). Flow rectifiers 34 are composed of plates having holes in them through which the fluid can flow, flow rectifiers 34
    8/21 being arranged in parallel along the direction of flow of the fluid, such that fluid passing through the holes is ground, and dust or the like contained in the fluid is removed.
    The detection unit 12 comprises a detection passage 36 that communicates between an upstream side and a downstream side of the throttling section 32 in the first passage 20 thereby to bypass the first passage 20, and a detection sensor 348, which it is arranged to face the detection passage 36. The detection sensor 38 is arranged in a cavity 40 provided on an outer circumferential surface of the first body 22.
    detection sensor 38 comprises a thermal flow sensor using MEMS (Micro Electro Mechanical Systems) technology, and comprises a pair of temperature measurement elements arranged around a heat generating element, in which the flow rate of the fluid that flowing through the detection passage 36 is detected based on a change in resistance value in the temperature measuring elements. In addition, the fluid flow rate is transmitted to the control unit 24 as a detection signal via a printed circuit sensor 42 which is connected to the detection sensor 38.
    The control unit 24 is installed in an upper part of the first body 22 facing the detection unit 12, and a printed circuit controller 44, which is electrically connected with respect to the detection sensor 38, is accommodated inside a first housing 46. A connector connection unit 48, which is capable of being connected to a connector from the outside, is arranged on a side portion of the first housing 46.
    9/21
    The display unit 26 comprises a printed circuit display 52 mounted on an upper part of the first housing 46 constituting the control unit 24, and which is electrically connected via connection wires 50 with respect to the printed circuit controller 44, and a display 54, which is able to display the flow rate of the fluid detected by the detection unit 12 or similar. The printed circuit display 52 and the display 54 are accommodated inside a second housing 56, display 54 being arranged to allow visual observation of the same from the outside. The printed circuit display 52 is also electrically connected via connection wires 50 to the connector connection unit 48.
    The flow rate control unit 18 includes the second body 30, which is connected to the flow rate detection unit 14, a control valve 58 disposed within the second body 30 and which is capable of adjusting the flow rate of the fluid flowing through the interior of the second body 30 and a switching unit 60 arranged in an upper part of the second body 30 for switching between open and closed states of the control valve 58.
    second body 30 is connected to the first body 22 substantially along a straight line, and is formed with a second passage 62 inside it through which the fluid flows. Halfway along the second passage 62, a valve seat 66 is formed, on which a valve body 64 that constitutes the control valve described later 58 can be seated. The valve seat 66 is formed with an annular shape facing downwards. In addition, a non-illustrated or similar tube is
    10/21 connected via a connecting element 28b to the other end of the second body 30.
    The control valve 58 comprises a cavity 68, which is formed in an upper wall of the second body 30, a diaphragm assembly 72 arranged in a space formed between the cavity 68 and a cover member 70 covering the cavity 68, a stem 74 connected to the diaphragm assembly 72 and which is arranged for displacement along a direction perpendicular to the second passage 62, the valve body 64 which is connected to a lower end of the stem 74, and a spring 74 disposed between the valve body 64 and a plug 76 which is connected to a lower part of the second body 30.
    The diaphragm assembly 72 is composed of a flexible thin film diaphragm 80 that is fitted between the second body 30 and the cover element 70, and retaining elements 82a, 82b that engage an upper surface side and a lower surface side. in a central portion of diaphragm 80. In addition, a space, which is defined between diaphragm assembly 72 and cover member 70, creates a supply chamber 84 in which pilot air is supplied under a switching action of a solenoid valve supply (supply valve) 92 which constitutes a switching unit (switching valve) 60. Supply chamber 84 communicates with supply passage 86, which is connected to an upstream side of a location where the control valve 58 is arranged in the second passage 62, whereby fluid passing through the supply passage 86 is supplied from the second passage 62 into the supply chamber 8 4.
    11/21
    The stem 74 is connected to extend downwardly from the center of the retaining elements 82a, 82b and is guided to move along a guide hole 8 formed in the second body 30. The guide hole 88 is formed to penetrate through from the center of the valve seat 66.
    The valve body 64 is formed with a substantially U-shape in cross section having a seat part 90 formed in an upper part thereof, and a tubular part 91 extending downwards perpendicularly to the seat part 90. The stem 74 is connected by a screw 97 to the center of the seat part 90, and the spring 78 is inserted into the tubular part 91. In addition, several communication holes 93 are formed in the seat wall 90, which penetrate in the axial direction of the valve body 64 to a radial inner side with respect to tubular part 91, such that the upper surface side and the
    surface continuously bottom of the seat part 90 are kept in Communication through From holes communication 93 •Beyond addition, the body of valve 64 is normally pressed to up per a force elastic gives spring 78 of
    so that the valve body 64 is seated by the pressure force on the valve seat 66 which is formed above the valve body 64. In this way, the communication between the upstream side and the downstream side of the second passage 62 is blocked centrally around the control valve 58. At that time, air in the second passage 62 on the downstream side in relation to the valve body 64 is introduced through the communication holes 93 inside the space 95 in which the spring 78 is arranged, and therefore, the valve body
    12/21 is placed in a balanced state, in which substantially the same pressure is equally imposed in upward and downward directions with respect to the upper surface side and lower surface side of the seat part 90.
    Consequently, for example, when the valve body 64 is separated from the valve seat 66 in this way to be placed in an open valve state, because a pressure force can be applied in relation to the valve body 64, which only needs to be sufficient to overcome the elastic force of the spring 78, the valve body 64 can be operated quickly and at low pressure.
    The switching unit 60 comprises the supply solenoid valve 92 for supplying fluid that passes through the second passage 62 with respect to the supply chamber 84, and a discharge solenoid valve (discharge valve) 94 for discharging fluid that has been discharged. supplied to the supply chamber 84. Supply solenoid valve 92 and discharge solenoid valve 94 are excited based on control signals from control unit 24 of flow rate detection unit 14, so switching between the supply and discharge states of the fluid are carried out with respect to the supply chamber 84.
    More specifically, by operating the supply solenoid valve 92, fluid that has flowed into the supply passage 86 from the second passage 62 is supplied into the supply chamber 84, whereby the diaphragm assembly 72 is pressed and displaced to low by fluid. As a result, the valve body
    13/21 is moved downwardly by stem 74 as opposed to the spring spring 78, whereby valve body 64 separates from valve seat 66 and communication with second passage 62 is established. Conversely, by operating the discharge solenoid valve 94, the fluid in the supply chamber 84 is discharged to the outside, whereby the downward pressure force with respect to the diaphragm assembly 72 is dissipated. Consequently, the valve body 64 is pressed upwards (in a direction indicated by the arrow A) by the elastic force of the spring 78, and by seating the valve body 64 on the valve seat 66, the state of communication with the second passage 62 is blocked.
    In addition, the control signals transmitted to the aforementioned supply solenoid valve 92 and discharge solenoid valve 94, for example, are PWM signals (pulse width modulated) or PFM signals (pulse frequency modulated), so the supply solenoid valve 92 and the discharge solenoid valve 94 are operated intermittently on the basis of such control signals. More specifically, according to a PWM control or a PFM control, as the supply solenoid valve 92 and the discharge solenoid valve 94 are not operated continuously, they can be controlled in such a way that the amount of heat emitted from there is suppressed .
    In addition, supply solenoid valve 92 and discharge solenoid valve 94 consist of two-way valves, which are capable of being electrically switched by respective electrical signals,
    14/21 such that by entering the above control signals into them, the supply chamber 84 is placed in a state of communication with the supply passage 86, or alternatively, with the outside.
    The supply solenoid valve 92 and the discharge solenoid valve 94 are not limited to being made up of two of the two-way valves. For example, in place of two of the two-way valves, the supply solenoid valve 92 and the discharge solenoid valve 94 can consist of a single three-way valve or a single five-way valve.
    The flow controller 10 according to the present invention is constructed basically as described above. In the following, operations and advantages of the flow controller 10 will be described. In the following explanations, as shown in figures 1 and 2, a closed valve state will be described as an initial condition in which, with no control signal being transmitted from control unit 24 with respect to supply solenoid valve 92 and the discharge solenoid valve 94, the valve body 64 is seated on the valve seat 66 by the spring spring 78, and the state of communication with the second passage 62 is blocked.
    First, fluid (e.g., air) is supplied through a tube not shown with respect to the first passage 20 of the flow rate detection unit 14, and the fluid passes through the holes of the various flow rectifiers 34 in the first passage 20 and flows downstream of it. At that time, dust contained in the fluid is captured and removed by the various flow rectifiers 34
    15/21 in the first passage 20, the fluid flow is rectified, and the fluid flows to the downstream side.
    Simultaneously with it, a control signal is transmitted from the control unit 24 with respect to supply solenoid valve 92, and by exciting supply solenoid valve 92, supply passage 86 is placed in a state of communication with the second passage 62. Consequently, a portion of the fluid that was introduced in the second passage 62 is supplied in the supply chamber 84 as pilot air, and the diaphragm assembly 72 together with the stem 74 is pressed down by the pilot air. In addition, the valve body 64 is moved downwards in opposition to the elastic force of the spring 78, and as a result of the valve body 64 which separates from the valve seat 66 thereby to place the first passage 20 and the second passage 62 in a communication state, fluid flows from the first passage 20 of the flow rate detection unit 14 into the second passage 62 of the flow rate control unit 18.
    At that time, as in the closed valve state, valve body 64 is in a balanced condition, in which air on the downstream side of valve body 64 is pressed against the upper surface side and the lower surface side of the seat part 90 respectively in
    balance, same if the air pilot provided the chamber in supply 84 for low under pressure, Assembly in diaphragm 72 can to be shifted down instantly
    to produce the valve open state.
    In addition, in the rate detection unit
    16/21 flow 14, the fluid passes through the reduced diameter choke section 32 and flows to the second passage 62 of the flow rate control unit 18. Along with it, a portion of the fluid flows from the side a upstream of the choke section 32 into the detection passage 36, and from the downstream side of the choke section 32 back into the first passage 20 and merges with the flow therein. With respect to the fluid introduced in the detection passage 36, the flow rate of the fluid is detected by the detection sensor 38 based on a difference in resistance generated by the pair of temperature measuring elements, and the detection result is transmitted as a detection signal to printed circuit controller 44 via printed circuit sensor 42. In addition, the fluid flow rate, for example, is transmitted to and shown on display 54 of display unit 26.
    In addition, the flow rate detected by the detection unit 12 is compared with a flow rate adjusted in advance in the control unit 24, and it is decided whether the flow rate is equal to or not the adjusted flow rate. For example, if the fluid flow rate is less than the set flow rate, then since it is necessary to increase the flow rate, a control signal is transmitted from the control unit 24 with respect to the valve supply solenoid 92, and the amount of fluid delivered to supply chamber 84 is increased. As a result, diaphragm assembly 72 is further moved downward to increase the rate of fluid flow flowing through the
    17/21 second pass 62, whereby the flow rate of the fluid is controlled to obtain the adjusted flow rate.
    On the other hand, in the case where the fluid flow rate is greater than the adjusted flow rate, a control is performed to decrease the amount by which the control valve is opened to decrease the flow rate. In this case, control signals are transmitted from the control unit 24 respectively and individually with respect to the supply solenoid valve 92 and the discharge solenoid valve 94. In addition, the supply solenoid valve 94 is placed in an OFF state, whereby the fluid supply to the supply chamber 84 is stopped by switching the supply solenoid valve 92, and together with it, by switching the discharge solenoid valve 94, fluid in the supply chamber 84 is discharged to the outside. As a result, the pressure force that presses diaphragm assembly 72 down is dissipated, whereby valve body 64, stem 74, and diaphragm assembly 72 are displaced upward by the spring force 78, and the flow rate of the fluid flowing between valve body 64 and valve seat 66 is throttled and decreased.
    As a result, the flow rate of the fluid flowing through the second passage 62 is reduced, and the flow rate of the fluid is controlled to obtain an adjusted flow rate.
    In the embodiment described above, although a structure is provided in which the supply passage 86 for introducing fluid into the supply chamber 84 is arranged on one side downstream of the
    18/21 flow rate 14, the invention is not limited by this aspect. For example, the supply passage 86 can be arranged on the upstream side of the flow rate detection unit 14, whereby fluid flowing through the first passage 20 is supplied to the supply chamber 84. In that case, since the fluid serving as pilot air to operate the flow rate control unit 18 is not detected as a flow rate in the flow rate detection unit 14, the flow rate of the fluid flowing on the downstream side of the flow rate unit flow rate control 18, and the flow rate that is detected by the flow rate detection unit 14 can match each other with high precision.
    In addition, the flow rate control unit 18 is not limited to being arranged on the downstream side of the flow rate detection unit 14, and can be arranged on the upstream side of the flow rate detection unit 14.
    In addition, instead of having the supply solenoid valve 92 and the discharge solenoid valve 94 that make up the switching unit 60 directly with respect to the second body 30 of the flow rate control unit 18, they can be arranged in separate positions of the unit
    control in rate in flow 18, and the drive Control of rate of flow 18 can be operated remotely to to control The rate in fluid flow. At the mode above, according with the present
    modality, in the detection unit 12 of the flow rate detection unit 14, as a thermal flow sensor using MEMS technology is employed, when the
    19/21 fluid flow rate is detected, the detection time can be shortened, and since the detection unit 12 can be operated at low current, the energy consumption can be reduced.
    In addition, in the flow rate control unit 18, which is capable of controlling the fluid flow rate, the control valve 58 is displaced under a fluid supply action, and as a balanced structure is provided in which the pressure force applied from the diaphragm assembly 72 with respect to the valve body 64 and the pressure force applied from the spring 78 with respect to the valve body 64 are equalized, when the diaphragm assembly 72 is pressed, the assembly diaphragm 72 can be displaced with pilot air having a low pressure, and valve body 64 can be operated quickly. In this way, a flow controller 10 capable of being operated at low pressures can be provided. In addition, as a small spring 78 can be adjusted therein, the flow rate control unit 18 including the aforementioned spring 78 can be made on a smaller scale, together with the scaling facilitation of the flow controller 10 as one all.
    In addition, in the aforementioned flow controller, for example, if a large flow rate control of the order of 1000 liters / minute is performed, it becomes necessary for the effective area of the second passage 62 to be increased corresponding to the rate large flow rate that passes through it, accompanied by the adjustment of the valve body to have a large piston area, and together with it, a spring must be employed having a force
    20/21 large elastic to overcome the pressure force applied from the fluid and to seat the valve body on the valve seat. In this case, an increase in spring size is caused, and due to the large elastic force of the spring, the operational force when the valve body is displaced as opposed to the elastic force must be large, and it is difficult to operate the valve body at low pressures.
    In contrast to the same, with the configuration of the present invention, the control valve 58 with the balanced structure mentioned above is adopted, and since respective pressure forces are normally applied equally to the upper surface side and the lower surface side of the valve body 64, even in the case where the effective area of the second passage 62 and the piston area of the valve body 64 are increased in such a way that a large flow rate control is carried out, it is necessary that the spring 78 be of increased size, and operations can be performed quickly and at low pressures.
    More specifically, in comparison with a flow controller that includes a flow rate control unit without such a balanced structure, in the present flow controller, for example, a large flow rate control of 1000 liters / minute or greater can be accomplished.
    In addition, as the control signals that are transmitted to the supply solenoid valve 92 and the discharge solenoid valve 94 that make up the switching unit 60, are PWM (pulse width modulated) or PFM (modulated by
    21/21 pulse frequency), and the supply solenoid valve 92 and the discharge solenoid valve 94 are operated intermittently based on such control signals, compared to a case of operating the supply solenoid valve 92 and the solenoid valve discharge 94 continuously, the amount of heat generated in this way can be suppressed, and deterioration in detection accuracy due to heat emitted from the switch unit 60 being transferred to the flow rate detection unit 14 can be avoided. In addition, energy consumption in switching unit 60 can be reduced.
    Additionally, in the flow rate control unit 18, as there is no need to operate the supply solenoid valve 92 and the discharge solenoid valve 94 when the fluid flow rate is stable, its durability can be increased, and energy consumption can be reduced.
    flow controller according to the present invention is not limited to the above described modality, and it is logical that several modified or additional structures can be adopted in it without departing from the essence of the present invention.
    权利要求:
    Claims (5)
    [1]
    1. Flow controller, comprising:
    a body (22, 30) having a first passage (20) arranged on one side upstream through which a fluid flows, a second passage (62) arranged on one side downstream with respect to the first passage (20), and a choke section (32) arranged between the first passage (20) and the second passage (62);
    a flow rate detector (14) disposed in the body (22, 30) and which has a detection unit (12) which is capable of detecting the flow rate of the fluid flowing from the first passage (20) to the second pass (62);
    a flow rate controller (18) for controlling a fluid flow rate and which is arranged in the body (22, 30) in parallel with the flow rate detector (14), characterized by the fact that the detection unit ( 12) consists of a MEMS sensor, the flow rate controller (18) further comprising a diaphragm assembly (72) which is displaced by supplying pilot air, a valve body (64) connected to the assembly of
    diaphragm (72) across an rod (74), and an spring (78) what is willing in an position facing the diaphragm (72) with the body in valve (64) between the themselves and induces the valve body (64) in an
    direction to be seated on a valve seat (66) formed
    Petition 870190051686, dated 06/03/2019, p. 9/15
    [2]
    2/3 on the body (22, 30), the valve body comprises a seat part (90) which is seated on the seat
    valve (6 6) and to which the rod (74) and the spring (78) are connected, an tubular part (91), for inside of which spring (78) is inserted, and one communication hole (93) what is formed in part of headquarters (90), an balance structure for balance,
    when air present on the downstream side of the valve body (64) is introduced into the tubular part (91) through the communication hole (93) under a closed valve state, a pressure force applied to a receiving surface pressure on the diaphragm mounting side (72) of the valve body (64) by the air present on the downstream side of the valve body (64) with a pressure force applied to a pressure receiving surface on the spring side ( 78) of the valve body (64) by the air present inside the tubular part, the pilot air is part of the fluid.
    2. Flow controller according to claim 1, characterized in that the flow rate control unit (18) further comprises a switching valve (60) for switching a pilot air supply state, the valve switching device (60) being operated by a control signal transmitted from a control unit (24), wherein the control signal is a PWM signal or a PFM signal.
    [3]
    3. Flow controller, according to
    Petition 870190051686, dated 06/03/2019, p. 10/15
    3/3 claim 2, characterized by the fact that the switching valve (60) is composed of a supply valve (92) that supplies pilot air to a supply chamber (84) formed between the diaphragm assembly (72) and the body (30) for operating the diaphragm assembly (72), and a discharge valve (94) that discharges pilot air from the supply chamber (84) to its exterior to return the diaphragm assembly (72 ), the supply valve (92) and the discharge valve (94) comprising two-way valves that are operated by the control signal.
    [4]
    Flow controller according to any one of claims 1 to 3, characterized in that an elastic spring force (78) is applied with respect to the valve body (64) in the same direction as the flow direction of the fluid.
    [5]
    Flow controller according to any one of claims 1 to 4, characterized in that the pilot air is supplied with respect to the diaphragm assembly (72) from an upstream side of the flow rate detector ( 14).
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    同族专利:
    公开号 | 公开日
    DE112010004226T5|2013-01-03|
    CN102576230A|2012-07-11|
    KR101416285B1|2014-07-08|
    KR20120085263A|2012-07-31|
    TWI432931B|2014-04-01|
    WO2011048896A1|2011-04-28|
    CN102576230B|2015-05-13|
    RU2515208C2|2014-05-10|
    BR112012009504A2|2016-05-17|
    JP5250875B2|2013-07-31|
    US8800593B2|2014-08-12|
    US20120204974A1|2012-08-16|
    JP2011090381A|2011-05-06|
    DE112010004226B4|2017-06-01|
    TW201133171A|2011-10-01|
    RU2012119820A|2013-11-27|
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    法律状态:
    2019-01-08| B06F| Objections, documents and/or translations needed after an examination request according [chapter 6.6 patent gazette]|
    2019-04-02| B06T| Formal requirements before examination [chapter 6.20 patent gazette]|
    2019-09-10| B09A| Decision: intention to grant [chapter 9.1 patent gazette]|
    2019-10-15| B16A| Patent or certificate of addition of invention granted [chapter 16.1 patent gazette]|Free format text: PRAZO DE VALIDADE: 20 (VINTE) ANOS CONTADOS A PARTIR DE 16/09/2010, OBSERVADAS AS CONDICOES LEGAIS. (CO) 20 (VINTE) ANOS CONTADOS A PARTIR DE 16/09/2010, OBSERVADAS AS CONDICOES LEGAIS |
    2021-08-10| B21F| Lapse acc. art. 78, item iv - on non-payment of the annual fees in time|Free format text: REFERENTE A 11A ANUIDADE. |
    2021-11-30| B24J| Lapse because of non-payment of annual fees (definitively: art 78 iv lpi, resolution 113/2013 art. 12)|Free format text: EM VIRTUDE DA EXTINCAO PUBLICADA NA RPI 2640 DE 10-08-2021 E CONSIDERANDO AUSENCIA DE MANIFESTACAO DENTRO DOS PRAZOS LEGAIS, INFORMO QUE CABE SER MANTIDA A EXTINCAO DA PATENTE E SEUS CERTIFICADOS, CONFORME O DISPOSTO NO ARTIGO 12, DA RESOLUCAO 113/2013. |
    优先权:
    申请号 | 申请日 | 专利标题
    JP2009-241343|2009-10-20|
    JP2009241343A|JP5250875B2|2009-10-20|2009-10-20|Flow controller|
    PCT/JP2010/066034|WO2011048896A1|2009-10-20|2010-09-16|Flow controller|
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